Technology Outsourcing Solution


TOS, through consistent effort in R&D will exert itself to gain customers'
trust and grow together with them.

ARC Detector

Plasma Arc Detector

ARC Detector
  • Detection of fine particles during plasma processing
  • High Speed Sampling Time (40MHz)
  • Algorithm for arc Detection (200 to 1100nm)
  • Sensor : High Sensitive UV Photo Detector
  • Appliction : Dry Etch, PECVD, ETC