Technology Outsourcing Solution


TOS, through consistent effort in R&D will exert itself to gain customers'
trust and grow together with them.

I - Probe

I-Probe Arc Detector

ARC Detector
  • Detection of fine particles during non-plasma processing
  • High Speed Sampling Time (40MHz)
  • Algorithm for Arc Detection (0 ~ 10000nm)
  • Sensor : High Sensitive Current Transformer
  • Appliction : Dry Etch, PECVD