Technology Outsourcing Solution


TOS, through consistent effort in R&D will exert itself to gain customers'
trust and grow together with them.


ALD Valve Monitoring System

ARC Detector
  • High speed (0.1msec) monitoring system
  • ALD valve delay compensation control
  • Critical precise control
  • yield improvement and PC cycle time management and improvement
  • Appliction : ALD, Etc